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Synfacts 2008(4): 0362-0362
DOI: 10.1055/s-2008-1042838
DOI: 10.1055/s-2008-1042838
Synthesis of Materials and Unnatural Products
© Georg Thieme Verlag Stuttgart · New York
Lithography with a Metallopolymer
K. Liu, C.-L. Ho, S. Aouba, Y.-Q. Zhao, Z.-H. Lu, S. Petrov, N. Coombs, P. Dube, H. E. Ruda*, W.-Y. Wong*, I. Manners*
University of Toronto, Canada, Hong Kong Baptist University, P. R. of China, University of Bristol, UK and McMaster University, Hamilton, Canada
Further Information
Publication History
Publication Date:
19 March 2008 (online)
Significance
The bimetallic polymer P1 was found to yield FePt nanoparticles with narrow size distribution upon pyrolysis under an N2 atmosphere. The FePt nanoparticles uniformly possessed a face-centered tetragonal structure and were ferromagnetic at room temperature. In addition, P1 was found to act as an efficient negative resist in electron-beam lithography. UV irradiation of a thin film of P1 on silicon through a contact mask produced sharp features (>20 m) with well-defined edges after development in CH2Cl2.